3D-Topography images of flexible MEMS structures:

In the last years wafer structures were realized, that include thin flexible structures operating as actuator when a voltage is applied across these structures. Examples for products including such devices are microgrippers. These structures are narrow with upright walls. Optical measurements cannot resolve such perpendicular structures, and tactile instruments would just bend the flexible structures without resolving them. Since the 3D-Nanofinger is a "non-contact tactile instrument" it can resolve such sensitive structures.

The following 3D topography scans were made at such a MEMS device structured in silicon: