Linescan measurements at V-grooves of glass fiber guides:

The following measurements are made at V-grooves that were prepared as glass fiber guides in the optical industry. The left Linescan gives an overview about the array of V-grooves, the right Linescan was made only along one single V-groove in high resolution:

In 3D mode it is possible to prepare a 3D topography scan of one single V-groove in high resolution:   Other measurement methods are not able to measure along these sample structures:
Confocal Microscopes cannot measure deep into the grooves:
A chromatic aberration sensor can measure deep into the grooves but delivers a wrong shape: