The 3D-Nanofinger® is part of
the Nanorobotics series developed by .
The Manual Control program offers all features necessary
for the different operation modes of the 3D-Nanofinger®. For topography,
surface roughness and dimensional measurements the 3D Nanofinger®
sensor is moved along a sample surface. It is possible to define
the increments freely in all axes for selecting a good ratio between
speed, scan path length and resolution. A software module allows
the selection between the different operation modes. The scan directions
can be selected individually.
The functionality of the 3D Nanofinger®
is included in our process control sequencer for automation. This
allows to prepare a set of measurements at different positions,
e.g.: move to position 1, make a Linescan with pre-defined parameters,
then move to position 2, scan a 3D-image of this area with pre-defined
parameters, later move to position 3 and measure a surface roughness.
Or the automation can be used to integrate the
3D-Nanofinger® into more complex automation procedures, like the
height measurement of microparts during assembly steps or the dimensional
measurement of adhesive bonding points right after their placements.
No Profilometer or Coordinate measuring machine
offers these features.
Data Analysis after the measurements:
The Analysis software module allows post data
processing of data sets measured e.g. with the 3D-Nanofinger®. It
is included as module in NanoControl. The data import can be from
ASCII format files, like the data files of the 3D-Nanofinger® with
the file name suffix ".XYZ". Such a data file contains
a whole array of scans with XYZ coordinates. The structure is that
of TAB-separated columns. This file can also be opened easily with
Excel or other data processing software systems. The Analysis software
can store and open data sets also in its own compressed data format
including the operations that were used in the Analysis program.
The main window of the "Analysis" software is shown on
the right side:
The upper area of the main window includes the plot list. Each row
represents one XYZ dataset, e.g. forming one line of a surface profile.
The whole set of rows in the plot list represents the content of
one data file.
Below this plot list a first diagram window shows the content of
the plot list row that is marked with the cursor line. When a row
is marked active by clicking on it with the left mouse button, it
is possible to jump to the next row with the arrow keys. By scrolling
down with the arrow key it is possible to get a fast overview of
the data file content.
In the first diagram window the X-axis was selected as horizontal
axis and the Z-axis as the vertical axis. But the data set may have
been collected in another direction. Then it is necessary to rotate
the diagram axis relative to the XYZ axes of the data set. This
is possible with the bottom left cube and its 3 buttons.
A second diagram window shows the results of operations executed
at the data set. Numerical results are presented in the output window
Several filters data processing commands and algorithms for detecting
surface and dimensional properties are included, for example:
Sloping Level, XY Offset, Roughness, Distance, Angle, Fit line,
Best fit circle, Intersection Line - Line, or Intersection Line
Several customer designed commands to resolve special sample features
are prepared in addition.
The command list will be expanded continuously, in particular to
support the unique 3D-features of the 3D-Nanofinger®.